The effect of thickness on surface structure of rf sputtered TiO2 thin films by X-ray photoelectron spectroscopy, atomic force microscopy and scanning acoustic microscopy
VACUUM, vol.182, pp.109766, 2020 (SCI-Expanded)
- Publication Type: Article / Article
- Volume: 182
- Publication Date: 2020
- Journal Name: VACUUM
- Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED)
- Page Numbers: pp.109766
- Acibadem Mehmet Ali Aydinlar University Affiliated: No